MDC Differentially Pumped Direct Drive Rotary Motion Feedthroughs are precision-engineered for high-torque, high-speed rotation in ultrahigh vacuum (UHV) environments. Designed to withstand up to 100 lb-in (11.3 N·m) of rotational torque and speeds up to 500 rpm, these feedthroughs incorporate a differentially pumped dual FKM elastomer shaft seal configuration.

Two inboard radial bearings support the rotary shaft, and a 1/8" (3.18 mm) female pipe thread port between the seals allows differential pumping, achieving vacuum integrity to 10⁻⁹ Torr. Available in MDC Conflat® CF metal seal or ISO KF Kwik-Flange™ elastomer seal configurations, they are bakeable to 100°C (212°F) and install with a 1" (25.4 mm) bolt hole pattern.

Industry Applications

Ideal for ultrahigh vacuum systems requiring high-torque rotary motion, MDC’s differentially pumped feedthroughs support applications such as sample manipulation, wafer rotation, plasma or ion source actuation, and materials research under 10⁻⁹ Torr conditions. The robust design ensures long-term performance in semiconductor fabrication, coating systems, and scientific instrumentation that demand precision motion under extreme vacuum conditions.