Key Features

Integrated Heating System (IHS): Cartridge-style heater with optional thermocouple for precise thermal control.

High Conductance Body: Enlarged 2-1/2" (63.5 mm) ports minimize flow resistance.

Isolated Welded Bellows: Positioned outside process flow to reduce wear and buildup.

Durability: Rated for one-million-cycle operation, built with 304 stainless steel (optional 316 stainless steel).

Flexible Configurations: Available with ISO Flange, CF Flange, or tube designs.

Pressure Range: From 1×10⁻⁹ Torr minimum to 14.7 psi (1 bar) maximum.

Temperature Ratings:

Air Requirement: 80–100 psi (5.5–7 bar) compressed air for actuation.

Fast Actuation: 1-second open/close cycle.

Sealing Options: Standard FKM, with OFE Copper or FFKM available.

Standards & Compliance: ISO 3669, UHV rated to 1×10⁻¹³ mbar, high-temperature rated to 450°C.

Mounting & Compatibility: Rotatable/non-rotatable geometries, tapped or clearance bolt holes, compatible with Conflat® knife-edge flanges.