Key Features

Integrated Heating System (IHS): Cartridge-style heater with optional thermocouple for accurate thermal control.

High Conductance Body: Enlarged 3" (76.2 mm) ports deliver reduced flow resistance and maximum throughput.

Isolated Welded Bellows: Located outside process flow to prevent buildup and reduce wear.

Durability: Rated for one-million-cycle operation, with 304 stainless steel (optional 316 stainless steel) construction.

Flexible Configurations: Offered with ISO Flange, CF Flange, or tube connections.

Pressure Range: 1×10⁻⁹ Torr minimum to 14.7 psi (1 bar) maximum.

Temperature Ratings:

Compressed Air Requirement: 80–100 psi (5.5–7 bar) for actuation.

Fast Operation: 1-second open/close cycle.

Sealing Options: Standard FKM, with OFE Copper or FFKM alternatives for demanding environments.

Compliance & Standards: Complies with ISO 3669, UHV rated to 1×10⁻¹³ mbar, high-temperature rated to 450°C.

Mounting Options: Rotatable and non-rotatable designs, tapped or clearance bolt holes, Conflat® knife-edge compatibility.