Key Features

Integrated Heating System (IHS): Cartridge-style heater with optional thermocouple for precise control.

High Conductance Body: Enlarged 4" (101.6 mm) ports minimize resistance and maximize throughput.

Isolated Welded Bellows: Kept outside process flow to reduce buildup and wear.

Durability: Rated for one-million-cycle operation with robust 304 stainless steel (optional 316 stainless steel).

Flexible Configurations: Available in ISO Flange, CF Flange, or tube connections.

Pressure Range: 1×10⁻⁹ Torr minimum to 14.7 psi (1 bar) maximum.

Temperature Ratings:

Compressed Air Requirement: 80–100 psi (5.5–7 bar) for reliable operation.

Fast Actuation: 1-second open/close cycle.

Sealing Options: Standard FKM, with OFE Copper or FFKM alternatives.

Standards & Compliance: Meets ISO 3669, UHV rated to 1×10⁻¹³ mbar, high-temperature rated to 450°C.

Mounting: Rotatable/non-rotatable, tapped or clearance bolt holes, compatible with Conflat® knife-edge flanges.