MDC’s All-metal MLV Series Fine Leak Valves are engineered for precise gas admission into ultrahigh vacuum (UHV) systems. These valves are manually actuated and ideal for controlling hot or corrosive gases in critical research and processing environments. The valve body is constructed of Type 304 stainless steel, while the knife-edge seat is made from stellite, a corrosion- and heat-resistant superalloy.

Each valve is shipped in a leak-tight condition, with adjustable leak rates down to 7.5×10⁻⁸ Torr l/sec (1×10⁻⁷ mbar l/sec). Gas flow is regulated by relieving pressure on a replaceable nickel diaphragm. While the valve can be fully sealed, repeated full closures may reduce the diaphragm's life, necessitating periodic replacement for optimal performance.

Industry Applications

MDC’s Fine Leak Valves are trusted in surface science, semiconductor fabrication, space simulation, mass spectrometry, and thin-film deposition systems where precise gas control, chemical compatibility, and UHV reliability are critical. These valves provide long service life and minimal outgassing, making them ideal for cleanroom, research lab, and production vacuum systems requiring fine leak management at elevated temperatures.