The Circular Entry Load-Lock System from MDC is designed to facilitate rapid and reliable sample transfer between connected ultra-high vacuum (UHV) chambers without disrupting the main chamber vacuum. Samples are loaded via a quick-access door on a spherical staging chamber, visible through a viewport above the access point. Once sealed and evacuated, the manually actuated gate valve opens to allow sample transfer using a magnetically coupled transporter. The transporter mechanism offers 12" to 36" (304.8 mm to 914.4 mm) of linear motion, depending on model, and is guided along a linear bearing shaft for stable, friction-free movement. Sample diameters of 1-3/8", 2-3/8", and 3-3/4" (34.9 mm, 60.3 mm, and 95.3 mm) are supported. Optional guide rods and gimbal alignment mounts enhance precision and reduce system stress caused by port misalignment. Systems are UHV-compatible, bakeable to 302°F (150°C), and mounted using Conflat® CF flanges.

Industry Applications

MDC’s Circular Entry Load-Lock Systems are ideal for semiconductor fabrication, material science research, thin-film deposition, surface analysis, and vacuum testing systems. These systems ensure secure and contamination-free transfer of sensitive samples while preserving chamber vacuum integrity. With flexible configuration options and high-precision motion control, they support critical workflows in UHV environments where speed and reliability matter.