The Single Axis Z Stage V-Plane® from MDC is a modular building block engineered for precise vertical (Z-axis) motion within ultrahigh vacuum (UHV) systems. Designed for both standalone operation and integration with other V-Plane® modules, it enables full customization of vacuum sample manipulation systems.

This Z stage features a handwheel-driven worm gear mechanism that ensures smooth, controlled vertical displacement, available in travel lengths from 6 to 36 inches (152.4 mm to 914.4 mm). Displacement is easily monitored using a frame-mounted linear scale. For enhanced support, MDC recommends guide tubes on all 1.5 inch (38.1 mm) bore stages with travel over 6 inches (152.4 mm).

Built from UHV-compatible stainless steel, the unit includes a welded bellows seal for leak-tight motion and is bakeable to 230°C (446°F). Available with manual or motorized actuation and Conflat® CF flange mounts to suit bore diameters from 1.5 to 4 inches (38.1 to 101.6 mm).

Industry Applications

The V-Plane® Single Axis Z Stage is a core component in semiconductor manufacturing, thin-film deposition, beamline experiments, and surface science setups. Its long-stroke vertical precision, UHV compatibility, and stackable design make it ideal for high-precision sample manipulation, instrument alignment, and multi-axis vacuum motion systems in advanced R&D and industrial applications.