MDC’s ULV Series Precision Leak Valves are engineered for ultrahigh vacuum (UHV) systems requiring precise gas admission control. These all-metal valves are manually actuated via a cantilever arm fitted with extra-fine pitch threads, allowing for ultra-fine flow adjustments. Designed for use with hot and corrosive gases, the valve body is fabricated from 304 stainless steel, offering excellent chemical resistance.

Leak rates are adjustable down to a minimum of 1×10⁻¹⁰ Torr l/sec (1.33×10⁻¹⁰ mbar l/sec), achieved by modulating pressure on a replaceable OFE copper seat. A high purity sapphire poppet, also replaceable, ensures reliable sealing and repeatability. All valves are shipped in a leak-tight condition, ensuring immediate integration into critical UHV setups.

Industry Applications

MDC’s Precision Leak Valves are optimized for semiconductor fabrication, surface science, mass spectrometry, thin film deposition, and space simulation systems. Their ability to regulate minimal leak rates makes them essential in cleanroom, laboratory, and industrial vacuum environments where temperature, purity, and precision are critical to gas flow control and contamination prevention.