The Triple Axis Compact XYZ Stage delivers high-precision motion control in ultra-high vacuum (UHV) environments while maintaining a compact design. Available with Z-axis travel of 2" or 4" (50.8 mm or 101.6 mm) and bore diameters of 1.50" or 2.50" (38.1 mm or 63.5 mm), this stage is ideal for precise sample manipulation in limited-space systems. The Z-axis is driven by a fine-pitch lead screw mechanism, while XY axes are controlled via micrometers with laser-etched ±0.50" (±12.7 mm) displacement scales. Cross roller bearing slides ensure smooth and repeatable motion. Conflat® CF flanges (2-3/4" [69.85 mm] and 4-1/2" [114.3 mm]) and edge-welded stainless steel bellows provide reliable UHV sealing. Position readouts are available via an integrated inch/mm graduated machinist’s scale.

Industry Applications

The Compact XYZ Stage is ideal for surface science, synchrotron beamlines, sample positioning, thin-film analysis, and semiconductor research. Its triple-axis precision, combined with a space-saving design, makes it especially suitable for UHV systems requiring multi-directional motion in confined environments. The robust build and bakeable materials ensure dependable performance under demanding vacuum conditions.